Design and Evaluation of Control Algorithms for MEMS Devices in MATLAB/Simulink



Abstract Views
97

Downloads
94

Citations

Share

##plugins.themes.bootstrap3.article.sidebar##

Submitted Aug 19, 2023
Published Nov 6, 2023
10.24018/ejmath.2023.4.6.284

Abstract viewed = 97 times

Table of Contents

##plugins.themes.bootstrap3.article.main##

The field of Micro-Electro-Mechanical Systems (MEMS) Has witnessed significant advancements in recent years, enabling the development of miniaturized devices with diverse applications. Efficient control algorithms play a crucial role in optimizing the performance of MEMS devices, ensuring accurate sensing and actuation capabilities. This paper presents the design and evaluation of control algorithms for MEMS devices using MATLAB/Simulink, a versatile simulation environment. The proposed research focuses on the development of control algorithms tailored specifically for MEMS devices. The design process involves modeling the MEMS system in MATLAB/Simulink and incorporating real-world constraints and dynamics. To evaluate the performance of the control algorithms, extensive simulations are conducted. The outcomes of this research provide valuable insights into the design and evaluation of control algorithms for MEMS devices in MATLAB/Simulink. The results demonstrate the effectiveness and efficiency of the developed algorithms in enhancing the performance of MEMS systems. Furthermore, the research contributes to expanding the knowledge base of MEMS control design, paving the way for advanced applications and innovations in this rapidly evolving field.

Keywords: Design evaluation, MEMS, simulation

References

  1. Allen JJ. Micro Electro Mechanical System Design. Taylor & Francis, India: CRC press; 2015.
     Google Scholar
  2. Pawara SJ, Patilb BA. Study of micro-electro mechanical system (MEMS) design methodologies. [Internet] 2023 [cited 2023 Oct 15]. Available from: https://www.researchgate.net/publication/309419351_Study_of_MicroElectro_Mechanical_System_MEMS_Design_Methodologies.
     Google Scholar
  3. Maluf N,Williams K. An Introduction to Microelectromechanical Systems Engineering. Boston, MA: Artech House; 2004.
     Google Scholar
  4. Scott MW. MEMS and MOEMS for national security applications. In Micromachining and Microfabrication Process Technology VIII. SPIE (Society of Photo-Optical Instrumentation Engineers), 2003, pp. 26–33.
     Google Scholar
  5. Senturia SD. Microsensors vs. ICs: a study in contrasts. IEEE Circuits Devices Mag. 1990;6(6):20–7.
     Google Scholar
  6. Chollet F, Liu H. A (not so) short introduction to micro electro mechanical systems. MEMS Encycl. 2013.
     Google Scholar
  7. Hubbard T, MaherMA, Martin RD, Parrish P, Tyree V. Structured design methods forMEMS final report A workshop sponsored by the National Science Foundation. 1996.
     Google Scholar
  8. Antonsson EK. Structured design methods for MEMS final report. In A Workshop sponsored by the National Science Foundation. Citeseer, 1995.
     Google Scholar
  9. Mastrangelo CH. 4.8 Structured design methods for MEMS: essential tools. In Structured Design Methods for MEMS Final Report: AWorkshop Sponsored by the National Science Foundation. Hubbard T, MaherMA, Martin RD, Parrish P, Tyree V Eds., 1996, pp. 81–90.
     Google Scholar
  10. Meirovitch L. Methods of Analytical Dynamics. New York, NY: Courier Corporation; 2010.
     Google Scholar
  11. Mead DJ. Leonard Meirovitch, elements of vibration analysis, McGraw-Hill Book Company, New York (1986). J Sound Vib. 1987;117(3):603–4.
     Google Scholar
  12. Smith PF, Longley WR. Theoretical Mechanics. Boston, MA: Ginn; 1910.
     Google Scholar
  13. Miu DK. Mechatronics: Electromechanics and Contromechanics. Dordrecht, Netherlands: Springer Science & Business Media; 2012.
     Google Scholar
  14. Dyck CW,Allen JJ, HuberRJ. Parallel-plate electrostatic dual-mass resonator. In Micromachined Devices and Components V. Bellingham, WA, USA: SPIE, 1999, pp. 198–209.
     Google Scholar
  15. Thomson WT. Theory of Vibrations with Applications. Englewood Cliffs, NJ: Prentice Hall; 1993.
     Google Scholar
  16. Lobontiu N. System Dynamics for Engineering Students: Concepts and Applications. Amsterdam and Boston; 2010.
     Google Scholar
  17. Nazdrowicz J, Napieralski A. Electrical equivalent model ofMEMS accelerometer in Matlab/SIMULINK environment. 2018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH), pp. 69–72, IEEE, 2018 Apr 18.
     Google Scholar
  18. Abdullah MA, Gadir ARARA, Rahman A, Ageeb AHE, Suliman AAB. Transfer function and Z-transform of an electrical system in MATLAB/Simulink. Eur J Math Stat. 2023;4(3):9–20.
     Google Scholar